Laser apparatus and control method thereof
AssigneeCanon Kabushiki Kaisha
InventorShigeru Ichihara
Life of this patent
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Abstract
Provided is a laser apparatus including a cavity having an output mirror and a reflective mirror, a laser medium and an excitation lamp disposed inside the cavity, a wavelength selector allowing selection of a wavelength for laser light pulses to be emitted from among a plurality of wavelengths, and a controller controlling emission timing of the excitation lamp, emission energy of the excitation lamp that is determined depending on at which wavelength, of the plurality of wavelengths, the pulses are to be emitted, and emission of the pulses. The controller continuously emits a pulse train formed of a plurality of pulses including pulses of at least two wavelengths.
Claims16
A laser apparatus, comprising:
- a cavity configured to include an output mirror and a reflective mirror;
- a laser medium and an excitation lamp disposed inside the cavity;
- a wavelength selector configured to allow selection of a wavelength for laser light pulses to be emitted from among a plurality of wavelengths;
- and
- a controller configured to control emission timing of the excitation lamp, emission energy of the excitation lamp that is determined depending on at which wavelength, of the plurality of wavelengths, the pulses are to be emitted, and emission of the pulses, wherein
- the controller continuously emits a pulse train formed of a plurality of pulses including pulses of at least two wavelengths.
A control method for a laser apparatus that includes a cavity including an output mirror and a reflective mirror, a laser medium and an excitation lamp disposed inside the cavity, a wavelength selector allowing selection of a wavelength for laser light pulses to be emitted from among a plurality of wavelengths, and a controller controlling emission timing of the excitation lamp, emission energy of the excitation lamp that is determined depending on at which wavelength, of the plurality of wavelengths, the pulses are to be emitted, and emission of the pulses,
- the method comprising an emission step of operating the controller to continuously emit a pulse train formed of a plurality of pulses including pulses of at least two wavelengths.
Dependencies are inferred from the claim text.