Dissolved gas content measurement apparatus and liquid treatment apparatus
AssigneeSeiko Epson Corporation
InventorsAtsushi OSHIMA, Atsuya HIRABAYASHI
Life of this patent
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Abstract
A dissolved gas content measurement apparatus, which measures dissolved gas content in a liquid, includes: a flow path which includes a flow path resistance; a liquid containing chamber which communicates with the flow path; a pressure changing unit which changes inner pressure of the liquid containing chamber; a measurement unit which measures a pressure vibration cycle of the liquid, which is caused when the pressure changing unit operates, in a state where the liquid is contained in the flow path and the liquid containing chamber; and an obtaining unit which obtains the dissolved gas content based on the cycle.
Claims16
A dissolved gas content measurement apparatus which measures dissolved gas content in a liquid, comprising:
- a flow path which has a flow path resistance;
- a liquid containing chamber which communicates with the flow path;
- a pressure changing unit which changes inner pressure of the liquid containing chamber;
- a measurement unit which measures a pressure vibration cycle of the liquid, which is caused when the pressure changing unit operates, in a state where the liquid is contained in the flow path and the liquid containing chamber;
- and
- an obtaining unit which obtains the dissolved gas content based on the cycle.
A dissolved gas content measurement apparatus which measures dissolved gas content in a liquid, comprising:
- a flow path which includes a flow path resistance;
- a liquid containing chamber which communicates with the flow path;
- a piezoelectric element;
- and
- a drive circuit which applies a drive signal to the piezoelectric element,
- wherein the drive circuit detects current flowing through the piezoelectric element in a state where the liquid is contained in the flow path and the liquid containing chamber, and uses the detected current and a lookup table or a predetermined function to measure the dissolved gas content.
A dissolved gas content measurement apparatus which measures dissolved gas content in a liquid, comprising:
- a flow path which includes a flow path resistance;
- a liquid containing chamber which communicates with the flow path;
- a pressure changing unit which changes inner pressure of the liquid containing chamber;
- a measurement unit which measures pressure values and time of a plurality of waves in pressure vibration, which are caused when the pressure changing unit operates, in a state where the liquid is contained in the flow path and the liquid containing chamber;
- and
- an obtaining unit which obtains a pressure vibration cycle of the liquid by using a measurement result of the measurement unit and obtains the dissolved gas content.
Dependencies are inferred from the claim text.