Substrate processing apparatus, substrate transfer method and storage medium

A substrate transfer method of performing a process on substrates in parallel in a plurality of processing modules each of which is capable of performing at least a first process and a second process on the substrates, the substrate transfer method comprising:

• a process performing possibility determining process of determining whether it is possible to perform each of the first process and the second process in each of the plurality of processing modules;
• a transfer schedule creating process of creating, based on process recipes regarding processes to be performed on the substrates and a determination result in the process performing possibility determining process, a transfer schedule in which a substrate transfer device transfers the substrates into the plurality of processing modules in parallel after the process performing possibility determining process;
• and
• a substrate processing process of transferring the substrates within a transfer vessel into the plurality of processing modules according to the transfer schedule and performing processes thereon,
• wherein the transfer schedule is created such that a substrate is not transferred into a processing module which is determined not to be performed in the process performing possibility determining process but is transferred into a processing module which is determined to be performed.