Method and device for coating substrates

Abstract

The invention relates to a method and device for coating plate-shaped substrates, in particular glass substrates for solar cell production. The method includes heating the substrates, which are moved on transporting shafts through heating and coating chambers, by a different amount on the upper and lower sides, so that the coating temperature can be increased without the substrates becoming too soft to handle. A device is described which is suitable for carrying out the method and has heating and coating chambers, which have independent heating systems, as well as a transport system.

Dependencies are inferred from the claim text.