Mems device oscillator loop with amplitude control
AssigneeInvenSense, Inc.
InventorVadim TSINKER
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Abstract
A MEMS device and method for amplitude regulation of a MEMS device are disclosed. In a first aspect, the MEMS device comprises a MEMS resonator, a limiter coupled to the MEMS resonator, and a regulator coupled to the limiter. The MEMS device includes an amplitude control circuit coupled to the MEMS resonator. The amplitude control circuit controls a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device. In a second aspect, the method includes coupling a regulator to the limiter, coupling an amplitude control circuit to the MEMS resonator, and controlling a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device.
Claims20
A MEMS device, comprising:
- a MEMS resonator;
- a limiter coupled to the MEMS resonator;
- a regulator coupled to the limiter;
- and
- an amplitude control circuit coupled to the MEMS resonator, wherein the amplitude control circuit controls a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device.
A method for amplitude regulation of a MEMS device comprising a MEMS resonator and a limiter coupled to the MEMS resonator, the method comprising:
- coupling a regulator to the limiter;
- coupling an amplitude control circuit to the MEMS resonator;
- and
- controlling a supply of the limiter via the regulator to regulate oscillation loop amplitude of the MEMS device.
Dependencies are inferred from the claim text.