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US 2014/0076711 A1Published application
Trihalosilane refining device
AssigneeLG Chem, Ltd.
InventorsSung Kyu LEE, Joon Ho SHIN, Jong Ku LEE, Sung Kyun KIM
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Abstract
A trihalosilane refining device and a trihalosilane refining method are provided. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.
Claims18
A trihalosilane refining device comprising:
- a divided wall distillation column having a divided wall, which has a length of 30% or more with respect to a total theoretical plate number thereof, installed therein;
- and
- a first distillation column coupled to the divided wall distillation column,
- wherein the divided wall distillation column comprises an upper column region, a preliminary separation region, a main separation region and a lower column region, and has an inlet port, a first outlet port, a second outlet port and a third outlet port installed therein to introduce a feed containing a trihalosilane into the preliminary separation region.
1 more element
A trihalosilane refining method, comprising:
- introducing a feed containing a trihalosilane into a divided wall distillation column having a divided wall, which has a length of 30% or more with respect to a total theoretical plate number thereof, installed therein;
- and
- introducing an effluent flowing out from the divided wall distillation column into a first distillation column,
- wherein the divided wall distillation column comprises an upper column region, a preliminary separation region, a main separation region and a lower column region, and has an inlet port, a first outlet port, a second outlet port and a third outlet port installed therein to introduce the feed containing a trihalosilane into the preliminary separation region.
1 more element
Dependencies are inferred from the claim text.