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US 2014/0076710 A1Published application
Trihalosilane refining device
AssigneeLG Chem, Ltd.
InventorsSung Kyu LEE, Joon Ho SHIN, Jong Ku LEE, Sung Kyun KIM
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Abstract
A trihalosilane refining device and a trihalosilane refining method are provided. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.
Claims20
A trihalosilane refining device comprising:
- a divided wall distillation column;
- and
- a first distillation column coupled to the divided wall distillation column,
- wherein the divided wall distillation column has an upper column region, a preliminary separation region, a main separation region and a lower column region formed therein, and comprises:
- an inlet port installed to introduce a feed containing a trihalosilane into the preliminary separation region;
- a first outlet port installed to enable outflow of a component in the upper column region and to satisfy the following Expression 2;
- a second outlet port installed to enable outflow of a component in the main separation region;
- and
- a third outlet port installed to enable outflow of a component in the lower column region and to satisfy the following Expression 3:
- 0.0139P3−0.6467P2+12.692P+27.716≦Tt≦0.0139P3−0.6467P2+12.692P+37.716 Expression 2
- 0.016P3−0.7386P2+14.3P+78.759≦Tb≦0.016P3−0.7386P2+14.3P+88.759 Expression 3
- wherein Tt represents a temperature of the first outlet port or the component flowing out through the first outlet port, Tb represents a temperature of the third outlet port or the component flowing out through the third outlet port, and P represents an operating pressure of the upper column region of the divided wall distillation column.
9 more elements
A trihalosilane refining method, comprising:
- supplying a feed containing a trihalosilane into a divided wall distillation column;
- and
- introducing an effluent flowing out from the divided wall distillation column into a first distillation column,
- wherein the divided wall distillation column has an upper column region, a preliminary separation region, a main separation region and a lower column region formed therein, and comprises:
- an inlet port installed to introduce a feed containing a trihalosilane into the preliminary separation region;
- a first outlet port installed to enable outflow of a component in the upper column region;
- a second outlet port installed to enable outflow of a component in the main separation region;
- and
- a third outlet port installed to enable outflow of a component in the lower column region, and
- wherein operating conditions of the divided wall distillation column are adjusted to satisfy the following Expressions 2 and 3:
- 0.0139P3−0.6467P2+12.692P+27.716≦Tt≦0.0139P3−0.6467P2+12.692P+37.716 Expression 2
- 0.016P3−0.7386P2+14.3P+78.759≦Tb≦0.016P3−0.7386P2+14.3P+88.759 Expression 3
- wherein Tt represents a temperature of the first outlet port or the component flowing out through the first outlet port, Tb represents a temperature of the third outlet port or the component flowing out through the third outlet port, and P represents an operating pressure of the upper column region of the divided wall distillation column.
10 more elements
Dependencies are inferred from the claim text.