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US 2014/0076709 A1Published application
Trihalosilane refining device
AssigneeLG Chem, Ltd.
InventorsSung Kyu LEE, Joon Ho SHIN, Jong Ku LEE, Sung Kyun KIM
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Abstract
A trihalosilane refining device and a trihalosilane refining method are provided. The trihalosilane refining device can be useful in obtaining high-purity trihalosilane from a feed containing a trihalosilane while consuming a small amount of energy.
Claims16
A trihalosilane refining device comprising:
- a divided wall distillation column having an upper column region, a preliminary separation region, a main separation region and a lower column region formed therein and comprising an inlet port, a first outlet port, a second outlet port and a third outlet port, all of which are installed to introduce a feed containing a trihalosilane into the preliminary separation region;
- and
- a first distillation column coupled to the divided wall distillation column,
- wherein the second outlet port is formed at a 1/9 to 8/9 section of a divided wall section of the main separation region.
1 more element
A trihalosilane refining method, comprising:
- introducing a feed containing a trihalosilane through an inlet port of a divided wall distillation column, which has an upper column region, a preliminary separation region, a main separation region and a lower column region formed therein and comprises an inlet port, a first outlet port, a second outlet port and a third outlet port, all of which are installed to introduce a feed containing a trihalosilane into the preliminary separation region;
- and
- introducing an effluent, which flows out through the second outlet port formed at the 1/9 to 8/9 section of the divided wall section of the main separation region, into a first distillation column.
Dependencies are inferred from the claim text.