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US 2014/0050863 A1Published application
Evaporator with internal restriction
AssigneeSamsung Display Co., Ltd.
InventorsDamien Boesch, Martin Rosenblum
Life of this patent
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Abstract
An evaporator includes a vaporization chamber having a monomer inlet and a vapor outlet. There is a vapor nozzle in the vapor outlet. The evaporator also includes a collar positioned between the vaporization chamber and the vapor nozzle which increases the pressure in the evaporation chamber while the conductance through the nozzle is substantially unchanged.
Claims20
A method of flash evaporating a liquid, the method comprising:
- introducing the liquid into an inlet of a vaporization chamber;
- passing the liquid through an atomizer that is configured to ultrasonically vaporize the introduced liquid;
- and
- passing the vaporized liquid through a vapor nozzle that is fluidly cooperative with a vapor outlet of the vaporization chamber, where a collar is placed in fluid communication with the vaporization chamber such that an outwardly extending first portion of the collar forms a non-filtered single opening with a substantially unobstructed vapor flowpath therethrough such that upon the passage of the vaporized liquid through the collar, it increases a pressure in the vaporization chamber while leaving the conductance of the vapor through the vapor nozzle substantially unchanged.
1 more element
A method of flash evaporating a liquid, the method comprising:
- introducing the liquid into an inlet of a vaporization chamber that also has a vapor outlet;
- passing the liquid through an atomizer that is configured to ultrasonically vaporize the introduced liquid;
- and
- passing the vaporized liquid through a vapor nozzle that is fluidly cooperative with the vapor outlet, where a fluid passageway formed at least in part by a collar placed in fluid communication with the vapor outlet and vapor nozzle is defined by an outwardly extending first portion comprising an annular ring with an annular flange, the fluid passageway forming a substantially unobstructed vapor flowpath such that upon the passage of the vaporized liquid through the collar, it increases a pressure in the vaporization chamber while leaving the conductance of the vapor through the vapor nozzle substantially unchanged.
1 more element
A method of depositing a flash evaporated liquid, the method comprising:
- introducing the liquid into an inlet of a vaporization chamber that also has a vapor outlet;
- passing the liquid through an atomizer that is configured to ultrasonically vaporize the introduced liquid;
- passing the vaporized liquid through a vapor nozzle that is fluidly cooperative with the vapor outlet, where a collar is placed in fluid communication with the vapor outlet and vapor nozzle such that the collar comprises an outwardly extending first portion comprising an annular ring with an annular flange, and a non-filtered single opening with a substantially unobstructed vapor flowpath therethrough such that upon the passage of the vaporized liquid through the collar, it increases a pressure in the vaporization chamber while leaving the conductance of the vapor through the vapor nozzle substantially unchanged;
- and
- accumulating material on a substrate that is placed in fluid communication with the vapor nozzle.
2 more elements
Dependencies are inferred from the claim text.