Detachable components for space-limited applications through micro and nanotechnology (decal-mnt)

A method for the production of a component (2) or component system without substrates showing a thickness from approximately 1 to 50 μm on a sacrificial layer (3) or a carrier layer (4) or a carrier layer (4) located on a sacrificial layer (3),

• with the method comprising the following steps:
• a) a layer structure of a component (2) or the component system via various physical and/or chemical processes, with the construction occurring such that each individual layer of the component (2) of the component system shows a predetermined mechanic stress, with the mechanic stress of the individual layers of the component (2) or the component system essentially compensate each other in order to prevent any warping or folding,
• b) a physical and/or chemical removal of the sacrificial layer (3), if provided,
• c) the removal of the component (2) or the component system, and
• d) the repositioning of the component (2) or the component system.