Parallel radial mirror analyser for scanning microscopes
AssigneeNational University of Singapore
InventorsAnjam Khursheed, Hung Quang Hoang
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Abstract
A parallel radial mirror analyser (PRMA) (700) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen is disclosed. The PRMA comprises a zero-volt equipotential grid (728), and a plurality of electrodes (702, 704, 706, 708, 710, 712, 714, 716, 718, 720, 722) electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid (728) to form corresponding second-order focal points on a detector (206). The detector (206) is disposed external to the corresponding electrostatic fields. A related method is also disclosed.
Claims18
A parallel radial mirror analyser (PRMA) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen, the PRMA comprising:
- a zero-volt equipotential grid;
- and
- a plurality of electrodes electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to exit through the grid to form corresponding second-order focal points on a detector,
- wherein the detector is disposed external to the corresponding electrostatic fields.
A parallel radial mirror analyser (PRMA) for facilitating rotationally symmetric detection of charged particles caused by a charged beam incident on a specimen, the PRMA comprising:
- a plurality of electrodes electrically configured to generate corresponding electrostatic fields for deflecting the charged particles in accordance with respective energy levels of the charged particles to form corresponding first-order focal points on a zero-volt equipotential detector.
Dependencies are inferred from the claim text.