Magnetic random access memory with synthetic antiferromagnetic storage layers and non-pinned reference layers
AssigneeInternational Business Machines Corporation
InventorsDavid W. Abraham, Michael C. Gaidis, Janusz J. Nowak, Daniel C. Worledge
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Abstract
A method for fabricating a synthetic antiferromagnetic device, includes depositing a magnesium oxide spacer layer on a reference layer having a first and second ruthenium layer, depositing a cobalt iron boron layer on the magnesium oxide spacer layer; and depositing a third ruthenium layer on the cobalt iron boron layer, the third ruthenium layer having a thickness of approximately 0-18 angstroms.
Claims17
1-2. (canceled)
The method as claimed in claim 6 further comprising depositing a cap layer on the additional CoFeB layer.
(canceled)
A method for fabricating a synthetic antiferromagnetic (SAF) device, the method comprising:
- depositing a magnesium oxide (MgO) spacer layer on a reference layer having a first and second ruthenium (Ru) layer;
- depositing a cobalt iron boron (CoFeB) layer on the MgO spacer layer;
- depositing a third Ru layer on the CoFeB layer, the third Ru layer having a thickness of approximately 0 angstroms (Å) to 18 Å;
- and
- depositing an additional CoFeB layer on the third Ru layer,
- wherein the MgO spacer layer is magnetically coupled to the CoFeB layer, the first Ru layer and the CoFe layer after the device is subject to anneal temperatures of about 375° C. to 400° C.
(canceled)
The method as claimed in claim 18 wherein the first Ru layer is approximately 10 Å.
The method as claimed in claim 18 wherein the second Ru layer is approximately 21 Å.
15-17. (canceled)
A method for fabricating a synthetic antiferromagnetic (SAF) device, the method comprising:
- depositing a spacer layer disposed on a reference layer having a first ruthenium (Ru) layer and a second Ru layer;
- depositing a storage layer on the spacer layer, the storage layer including an additional Ru layer having a thickness of approximately 0 angstroms (Å) to 18 Å;
- depositing a cap on the storage layer;
- depositing a cobalt iron boron (CoFeB) layer on the spacer layer;
- depositing a third Ru layer on the CoFeB layer;
- and
- depositing an additional CoFeB layer on the third Ru layer.
A method for fabricating a synthetic antiferromagnetic (SAF) device, the method comprising:
- depositing a first tantalum (Ta) layer on a substrate;
- depositing a first ruthenium (Ru) layer on the first Ta layer, the first Ru layer having a thickness of approximately 10 angstroms (Å);
- depositing a cobalt iron (CoFe) layer on the first Ru layer;
- depositing a second Ru layer on the CoFe layer, the second Ru layer having a thickness of approximately 21 Å;
- depositing a first cobalt iron boron (CoFeB) layer on the second Ru layer;
- depositing a magnesium oxide (MgO) spacer layer on the first CoFeB layer;
- depositing a second CoFeB layer on the MgO spacer layer;
- depositing a third Ru layer on the second CoFeB layer, the third Ru layer having a thickness of approximately 18 Å;
- depositing a third CoFeB layer on the third Ru layer;
- depositing a cap layer on the third CoFeB layer;
- coupling a bottom contact to the substrate;
- and
- coupling a top contact to the cap layer.
Dependencies are inferred from the claim text.