Information processing apparatus, processing system, processing method, and program

A semiconductor treatment system, comprising:

• a semiconductor treatment apparatus;
• a plurality of information processing apparatuses for processing information on the semiconductor treatment apparatus;
• and
• a server computer connected to the plurality of information processing apparatuses via a communication network,
• wherein the plurality of information processing apparatuses includes a first information processing apparatus and a second information processing apparatus, the first information processing apparatus has an abnormality information display device configured to display information on an abnormality when the abnormality occurs in the semiconductor treatment apparatus, a countermeasure information receiving device configured to receive countermeasure information regarding a countermeasure for the abnormality, a countermeasure information storing device configured to store the countermeasure information such that the countermeasure information is matched with abnormality identification information for identifying the abnormality, an output device configured to output the countermeasure information and the abnormality identification information stored in the countermeasure information storing device to the server computer via the communication network, a countermeasure item display device configured to display a plurality of countermeasure item candidates when the abnormality occurs, a countermeasure item storing device configured to store a countermeasure item selected from the plurality of countermeasure item candidates displayed on the countermeasure item display device such that the countermeasure item is matched with the abnormality identification information, and a countermeasure item transmitting device configured to transmit the countermeasure item and the abnormality identification information stored in the countermeasure item storing device to the server computer via the communication network,
• the server computer has a server computer countermeasure information storing device configured to store the abnormality identification information and the countermeasure information transmitted from the first information processing apparatus, a countermeasure information reading device configured to read the countermeasure information corresponding to the abnormality identification information stored in the information storing device, a countermeasure information transmitting device configured to transmit the countermeasure information corresponding to the abnormality identification information read by the countermeasure information reading device to the second information processing apparatus, a countermeasure item storing device configured to store the countermeasure item and the abnormality identification information transmitted from the first information processing apparatus, a statistic generating device configured to generate a statistic regarding the countermeasure item corresponding to the abnormality identification information based on a plurality of countermeasure items corresponding to abnormality identification information data stored in the countermeasure item storing device, and a statistic transmitting device configured to transmit the statistic regarding the countermeasure item corresponding to the abnormality identification information generated by the statistic generating device to the second information processing apparatus, and
• the second information processing apparatus has a countermeasure information receiving device configured to receive the countermeasure information corresponding to the abnormality identification information transmitted from the server computer, a countermeasure information display device configured to display the countermeasure information received by the receiving device, a countermeasure item statistic receiving device configured to receive the statistic regarding the countermeasure item corresponding to the abnormality identification information transmitted from the server computer, and a countermeasure item statistic display device configured to display the statistic regarding the countermeasure item for the abnormality identification information received by the countermeasure item statistic receiving device when the abnormality occurs.

A method of processing information on a semiconductor treatment apparatus using an information processing apparatus, comprising:

• displaying information on an abnormality when the abnormality occurs in a semiconductor treatment apparatus;
• receiving countermeasure information regarding a countermeasure for the abnormality by a control device of the information processing apparatus;
• storing the countermeasure information received by the control device in the control device such that the countermeasure information is matched with abnormality identification information for identifying the abnormality;
• outputting the abnormality identification information and the countermeasure information stored in the control device to the outside via a communication device;
• displaying a plurality of countermeasure item candidates according to the control device when the abnormality occurs;
• storing a countermeasure item selected from the plurality of countermeasure item candidates such that the countermeasure item is matched with the abnormality identification information;
• transmitting the abnormality identification information and countermeasure item stored to the outside via the communication device;
• receiving the statistic regarding the countermeasure item corresponding to the abnormality identification information transmitted from the outside;
• and
• displaying the statistic regarding the countermeasure item for the abnormality identification information on the abnormality according to the control device when the abnormality occurs.