Minute structure and information recording medium

A method of manufacturing a minute structure, comprising the steps of:

• forming a layer, containing a sulfur compound and a silicon oxide, on a substrate;
• irradiating the layer containing the sulfur compound and the silicon oxide by a laser beam;
• etching the layer irradiated by the laser beam to form a minute structure,
• wherein the sulfur compound contains a first sulfur compound for raising an optical absorption ability to a light with a predetermined wavelength, or the layer containing the sulfur compound and the silicon oxide further contains a material for raising the optical absorption ability.

A write-once information recording medium, comprising:

• a substrate;
• and
• a recording layer formed of a mixed inorganic material and deposited on the substrate,
• wherein the mixed inorganic material contains a sulfur compound and a silicon oxide.