US 2014/0028152 A1 · OSCILLATION STRUCTURE OF MICRO ACTUATOR

Abstract

An oscillation structure of micro actuator is described. In the oscillation structure, a pair of torsion bars is disposed along a first axis perpendicular to a second axis. The first frame is connected to the pair of torsion bars wherein the torsion bars are disposed on the outer periphery of a first frame along the first axis and a second frame is disposed inside the first frame. Each of the first connection members connects the first frame to the second frame therebetween, and each of the second connection members connects the second frame to the oscillation body therebetween such that the first frame, the second frame and the oscillation body are allowed to rotate about the first axis by the torsion bars as a structure assemblies at an identical angle. The oscillation structure effectively reduces the dynamic deformation of micro actuator.

Claims22

Dependent claims

An oscillation structure applicable to a micro actuator, the oscillation structure comprising:

a pair of torsion bars disposed in a first axis perpendicular to a second axis;
a first frame coupled to the pair of torsion bars wherein the pair of torsion bars is disposed in an outer periphery of the first frame along the first axis;
a second frame disposed inside the first frame;
an oscillation body disposed inside the second frame;
at least four first connection members coupling the first frame to the second frame therebetween, wherein a pair of the first connection members of the first connection members is aligned to the first axis in a collinear manner;
at least four second connection members coupling the second frame to the oscillation body therebetween, wherein a pair of the second connection members of the second connection members is aligned to the first axis in a collinear manner to allow the first frame, the second frame and the oscillation body to rotate about the first axis by the pair of torsion bars.

3 more elements

Dependencies are inferred from the claim text.

Oscillation structure of micro actuator

Life of this patent

Oscillation structure of micro actuator

Life of this patent

Abstract

Claims22