Process and apparatus for producing glass member provided with sealing material layer and process for producing electronic device

An apparatus for producing a glass member provided with a sealing material layer, which comprises:

• a sample table on which a glass substrate having a frame-form coating layer of a sealing material paste prepared by mixing a sealing material containing a sealing glass and a laser absorbent with an organic binder, is to be placed;
• a laser light source to emit a laser light;
• a laser irradiation head having an optical system to irradiate the frame-form coating layer of the glass substrate with a laser light emitted from the laser light source;
• a power control part to control the power of the laser light to be applied to the frame-form coating layer from the laser irradiation head;
• a moving mechanism to relatively change the positional relation between the sample table and the laser irradiation head;
• a scanning control part to control the moving mechanism so as to apply the laser light with scanning along the frame-form coating layer and to adjust the scanning speed with the laser light in a finishing region from a position close to an irradiation finishing position which at least partially overlaps with an already fired portion of the frame-form coating layer to the irradiation finishing position, to be slower than the scanning speed with the laser light in a scanning region along the frame-form coating layer excluding the finishing region.

A process for producing an electronic device, which comprises:

• preparing a first glass substrate having a first surface having a first sealing region provided thereon;
• preparing a second glass substrate having a second surface having a second sealing region corresponding to the first sealing region provided thereon;
• applying a sealing material paste prepared by mixing a sealing material containing a sealing glass and a laser absorbent with an organic binder to the second sealing region of the second glass substrate in the form of a frame to form a frame-form coating layer;
• scanning and irradiating with a firing laser light along the frame-form coating layer of the sealing material paste to heat the entire frame-form coating layer with the laser light thereby to fire the sealing material while burning off the organic binder in the frame-form coating layer to form a sealing material layer;
• laminating the first glass substrate and the second glass substrate via the sealing material layer so that the first surface and the second surface face each other;
• and
• irradiating the sealing material layer with a sealing laser light through the first glass substrate or the second glass substrate to melt the sealing material layer thereby to form a sealing layer to seal an electronic element portion provided between the first glass substrate and the second glass substrate;
• wherein irradiating the sealing material layer, the scanning speed with the laser light in a finishing region from a position close to an irradiation finishing position which at least partially overlaps with an already fired portion of the frame-form coating layer to the irradiation finishing position, is adjusted to be slower than the scanning speed with the laser light in a scanning region along the frame-form coating layer excluding the finishing region.