Simulation method, simulation program, processing unit, and simulator

A non-transitory computer-readable medium storing a simulation program that allows an information processing unit to perform calculation, the calculation comprising:

• decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of a processing target that is a target of a predetermined processing;
• summing up the flux components for each of the plurality of unit vector directions;
• and
• synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target.

A processing unit comprising:

• a processing section performing a predetermined processing on a processing target;
• and
• a simulator simulating the predetermined processing, the simulator performing calculation including
• decomposing each of a plurality of incident fluxes into flux components in respective unit vector directions that are orthogonal to each other, the plurality of incident fluxes entering, at an arbitrary position, a surface of the processing target,
• summing up the flux components for each of the plurality of unit vector directions, and
• synthesizing a plurality of flux components into one vector, the plurality of flux components being summations in the respective unit vector directions and being orthogonal to each other, and thereby calculating a normal vector at the arbitrary position on the surface of the processing target.