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US 2014/0004667 A1Published application
Method for processing substrate and method for fabricating apparatus
AssigneeGold Charm Limited
InventorShusaku KIDO
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Abstract
A method for processing a substrate, the substrate comprising an organic film pattern, the method comprising: a fusion/deformation step of fusing said organic film pattern to deform the fused organic film pattern and a third removal step of removing at least a part of the fused and deformed organic film pattern.
Claims18
A method for processing a substrate, the substrate comprising an organic film pattern, the method comprising:
- a fusion/deformation step of fusing said organic film pattern to deform the fused organic film pattern;
- and
- a third removal step of removing at least a part of the fused and deformed organic film pattern.
Dependencies are inferred from the claim text.