Method of fabricating solar cell

A method of fabricating a solar cell, comprising:

• providing a substrate having a first surface and a second surface opposite to the first surface;
• performing a diffusion process to diffuse a dopant into the substrate to form a first doped region adjacent to the first surface, wherein the first doped region has a first doped type;
• forming a patterned mask layer on the first doped region, wherein the patterned mask layer shields a portion of the first doped region and exposes the other portion of the first doped region;
• partially removing the portion of the first doped region exposed by the patterned mask layer and a portion of the dopant in the first doped region exposed by the patterned mask layer to make the exposed portion of the first doped region as a lightly-doped region, wherein the lightly-doped region has a textured surface;
• removing the patterned mask layer to expose the other portion of the first doped region, wherein the other portion of the first doped region is a heavily-doped region and has a flat surface;
• forming a second doped region in the substrate adjacent to the second surface, wherein the second doped region has a second doped type opposite to the first doped type;
• and
• forming a first electrode on the heavily-doped region in the first surface of the substrate.