Transparent conductive electrode for three dimensional photovoltaic device

A method for forming a photovoltaic device, comprising:

• forming a plurality of three-dimensional structures in a substrate to form a textured profile, the textured profile including conically shaped peaks having non-perpendicular lateral surfaces configured to provide light trapping;
• depositing a first transparent electrode layer on the structures, from a transparent conductive oxide having a metal dopant, at a thickness configured to maintain the textured profile, the thickness configured to maintain the textured profile including a thickness of less than 450 nm;
• annealing the first transparent electrode layer at a temperature of between about 300 degrees to about 600 degrees Celsius and a duration of between 5 seconds and 90 seconds to increase conductivity and transmittance;
• forming a continuous photovoltaic stack including an N-type layer, a P-type layer and an intrinsic layer on the first transparent electrode layer;
• and
• depositing a second electrode layer over the photovoltaic stack.

A method for forming a photovoltaic device, comprising:

• forming a plurality of three-dimensional structures in a substrate to form a textured profile, the textured profile including conically shaped peaks having non-perpendicular lateral surfaces configured to provide light trapping;
• depositing a ZnO:Al layer on the structures including over non-planar surfaces at a thickness configured to maintain the textured profile, the thickness ranging between about 100 nm and about 350 nm;
• annealing the first transparent electrode layer at a temperature of between about 300 degrees to about 600 degrees Celsius and duration of between 5 seconds and 90 seconds to activate the Al to increase conductivity and to increase transmittance;
• forming a continuous photovoltaic stack including an N-type layer, a P-type layer and an intrinsic layer on the first transparent electrode layer;
• and
• depositing a second electrode layer over the photovoltaic stack.