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US 2014/0004644 A1Published application
Image sensor with a curved surface
AssigneesSTMicroelectronics (Crolles 2) SAS, STMicroelectronics S.r.l.
InventorsFrançois Roy, Lucile Broussous, Julien Michelot, Jean-Pierre Oddou
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Abstract
A method for manufacturing an image sensor, including the successive steps of: forming columns of a semiconductor material; forming one or several pixels at a first end of each of the columns; and deforming the structure so that the second ends of each of the columns come closer to each other or draw away from each other to form a surface in the shape of a polyhedral cap.
Claims15
A method for manufacturing an image sensor, comprising the successive steps or:
- defining, in a semiconductor substrate extending on a semiconductor support with an interposed insulating layer, through trenches delimiting columns,
- forming one or several pixels at a first end of each of the columns;
- and
- deforming the structure so that the second ends of each of said columns come closer to each other or draw away from each other to form a surface in the shape of a polyhedral cap.
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Dependencies are inferred from the claim text.