Surface protective sheet
AssigneeNitto Denko Corporation
InventorsJiro YAMATO, Keiji HAYASHI, Ryohei SAWAZAKI, Mariko YOSHIDA
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AssigneeNitto Denko Corporation
InventorsJiro YAMATO, Keiji HAYASHI, Ryohei SAWAZAKI, Mariko YOSHIDA
Estimating the term…
Provided is a surface protective sheet, which satisfactorily adheres to an adherend and which shows little increase in adhesion with time, can easily be re-released, reduces the amount of a pressure-sensitive adhesive remaining on the surface of the adherend after the release of the sheet, and does not impair the self-cleaning property of the surface of a coated plate as the adherend. The surface protective sheet includes: a base material layer; and a pressure-sensitive adhesive layer, in which, when the surface protective sheet is attached to a silicon wafer on the pressure-sensitive adhesive layer side of the sheet and left to stand at 40° C. for 24 hours, and then the surface protective sheet is released under a temperature environment of 23° C., the surface of the resultant silicon wafer has a C/Si ratio of 0.8 or less in photoelectron spectroscopy analysis.
A surface protective sheet, comprising:
Dependencies are inferred from the claim text.