Manufacture of structures comprising silicon dioxide on a surface
AssigneeNanolith Sverige AB
InventorsMagnus Odén, Emma Björk
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AssigneeNanolith Sverige AB
InventorsMagnus Odén, Emma Björk
Estimating the term…
A substrate surface comprises at least partially at least one elongated structure, wherein each elongated structure comprises a plurality of channels, said channels extending in the direction of the longitudinal axis of the elongated structure, wherein said at least one elongated structure comprises silicon dioxide. The structures are manufactured by: a) providing a reaction solution comprising a silicate, a micelle forming agent, an alkane, a salt, and at least 1.5 M HCl, having a pH of 2 or lower, b) stirring not more than 10 minutes, c) bringing the reaction solution into contact with a substrate surface and d) treating the obtained material with one method selected from a) heat treating the material above 300° C., b) treating the material with at least one selected from H2O2, and H2SO4, c) treating the material with microwaves to digest the micelle forming agent.
-26. (canceled)
A method for the manufacture of structures on a substrate surface, said method comprising the steps of:
Dependencies are inferred from the claim text.