Back to results
US 2014/0004277 A1Published application
Optical component and manufacaturing method thereof
AssigneeOlympus Corporation
InventorsTakeshi Deguchi, Yoshito Ito, Kei Kikuchi, Nobuyoshi Toyohara
Life of this patent
Estimating the term…
Abstract
A method of manufacturing an optical component by forming an optical thin film on a substrate made of resin using either an ion assisted deposition method or a plasma assisted deposition method, and by controlling a first parameter, which includes at least one of gas flow amount, irradiation duration, and applied power of the ion assisted method or the plasma assisted method, according to a second parameter relevant to a radius of curvature of the substrate.
Claims10
A manufacturing method of an optical component, the method comprising:
- forming an optical thin film on a substrate made of resin by an ion assisted deposition method or a plasma assisted deposition method,
- controlling a first parameter, which includes at least one of gas flow amount, irradiation duration, and applied power of the ion assisted method or the plasma assisted method, according to a second parameter relevant to a radius of curvature of the substrate.
Dependencies are inferred from the claim text.