Magnetic recording medium manufacturing method
AssigneeKabushiki Kaisha Toshiba
InventorsKaori KIMURA, Masatoshi SAKURAI, Kazuto KASHIWAGI, Akihiko TAKEO
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Abstract
According to one embodiment, there is provided a magnetic recording medium manufacturing method including forming a resist layer on a magnetic recording layer, patterning the resist layer, forming a magnetic pattern by performing ion implantation through the resist layer, partially modifying the surface of the magnetic recording layer, removing the resist, applying a self-organization material to the surface of the magnetic recording layer and forming a dotted mask pattern, and patterning the magnetic recording layer.
Claims14
A magnetic recording medium manufacturing method comprising:
- forming a resist layer on a magnetic recording layer of a magnetic recording medium, the magnetic recording medium comprising a substrate and the magnetic recording layer formed on the substrate;
- patterning the resist layer;
- performing ion implantation through the resist layer to partially inactivate magnetism of the magnetic recording layer and to form a magnetic pattern;
- partially modifying a surface of the magnetic recording layer through the resist layer;
- removing the resist;
- applying a self-organization material to the partially modified surface of the magnetic recording layer, and causing phase separation to form a dotted mask pattern;
- and
- patterning the magnetic recording layer in accordance with the mask pattern.
A magnetic recording medium manufacturing method comprising:
- forming a resist layer on a magnetic recording layer of a magnetic recording medium, the magnetic recording medium comprising a substrate and the magnetic recording layer formed on the substrate;
- patterning the resist layer;
- performing ion implantation through the resist layer to partially inactivate magnetism of the magnetic recording layer, to form a magnetic pattern, and to partially modify a surface of the magnetic recording layer;
- removing the resist;
- coating the partially modified surface of the magnetic recording layer with a self-organization material, and causing phase separation to form a dotted mask pattern;
- and
- patterning the magnetic recording layer in accordance with the mask pattern.
Dependencies are inferred from the claim text.