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US 2014/0004256 A1Published application
Methods of Forming Charge-Trapping Regions
AssigneeMicron Technology, Inc.
InventorNishant Sinha
Life of this patent
Estimating the term…
Abstract
Some embodiments include methods of forming charge-trapping zones. The methods may include forming nanoparticles, transferring the nanoparticles to a liquid to form a dispersion, forming an aerosol from the dispersion, and then directing the aerosol onto a substrate to form charge-trapping centers comprising the nanoparticles. The charge-trapping zones may be incorporated into flash memory cells.
Claims22
A method of forming a charge-trapping zone, comprising:
- forming a plurality of nanoparticles;
- comprising coating the nanoparticles with dielectric material which forms charged surfaces around the nanoparticles;
- transferring the nanoparticles to a liquid, and forming a dispersion of the nanoparticles within the liquid;
- forming an aerosol from the dispersion;
- and
- directing the aerosol onto a substrate utilizing the aerosol to form charge-trapping centers comprising the nanoparticles, individual charge-trapping centers being spaced from one another by intervening gaps.
3 more elements
A method of forming a charge-trapping zone, comprising:
- forming a plurality of nanoparticles;
- coating the nanoparticles with electrically conductive material to form coated nanoparticles prior to transferring the nanoparticles to the liquid
- transferring the coated nanoparticles to a liquid, and forming a dispersion of the nanoparticles within the liquid;
- forming an aerosol from the dispersion;
- and
- directing the aerosol onto a substrate utilizing the aerosol to form charge-trapping centers comprising the nanoparticles, individual charge-trapping centers being spaced from one another by intervening gaps.
3 more elements
A method of forming a charge-trapping zone, comprising:
- forming a plurality of nanoparticles over a surface;
- stripping the nanoparticles from the surfaces;
- cleaning the nanoparticles;
- coating the nanoparticles with electrically conductive material
- transferring the cleaned nanoparticles to a liquid, and forming a dispersion of the nanoparticles within the liquid;
- forming an aerosol from the dispersion;
- and
- directing the aerosol onto a substrate to form charge-trapping centers comprising the nanoparticles, individual charge-trapping centers being spaced from one another by intervening gaps.
5 more elements
A method of forming a charge-trapping zone, comprising:
- forming a plurality of nanoparticles associated with a first medium;
- separating the nanoparticles from the first medium and forming a powder of the nanoparticles;
- dispersing of the powder within a liquid to form a dispersion;
- forming an aerosol from the dispersion;
- and
- directing the aerosol onto a substrate to form charge-trapping centers comprising the nanoparticles, individual charge-trapping centers being spaced from one another by intervening gaps.
3 more elements
Dependencies are inferred from the claim text.