Edge seal for lower electrode assembly
AssigneeLam Research Corporation
InventorsDavid Schaefer, Ambarish Chhatre, Keith William Gaff, Sung Lee, Brooke Mesler Lai
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Abstract
A lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber includes a temperature controlled lower base plate, an upper plate, a mounting groove surrounding a bond layer and an edge seal comprising an elastomeric band having an outer concave surface in an uncompressed state, the band mounted in the groove such that upper and lower ends of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance.
Claims28
A lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber comprising:
- a temperature controlled lower base plate, an upper plate, and a mounting groove surrounding a bond layer in the lower electrode assembly;
- and
- an edge seal comprising an elastomeric band having an outer concave surface in an uncompressed state, the band mounted in the groove such that upper and lower ends of the band are axially compressed and a maximum outward bulging of the band is no greater than a predetermined distance.
An edge seal for a lower electrode assembly useful for supporting a semiconductor substrate in a plasma processing chamber wherein the lower electrode assembly includes a temperature controlled lower base plate, a heater plate, an upper plate, a first bond layer attaching the lower plate to the heater plate, a second bond layer attaching the heater plate to the upper plate and a mounting groove formed by an outer surface of the heater plate and opposed surfaces of the upper and lower plates, the edge seal comprising:
- an elastomeric band having an outer concave surface in an uncompressed state, the band dimensioned to fit in the groove such that an inner periphery of the band surrounds the heater plate and the upper and lower bond layers and upper and lower ends of the band are axially compressed between the upper and lower plates such that a maximum outward bulging of the band is no greater than a predetermined distance
Dependencies are inferred from the claim text.