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US 2013/0340941 A1Published application
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AssigneeTel Solar AG
InventorStephan JOST
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Abstract
This disclosure relates a system and techniques for adjusting component parts of a Plasma-enhanced processing system. The electric field uniformity generated by plasma processing may be improved by adjusting the distance between a cavity of an upper electrode and an insulating plate that covers, at least a portion of, the cavity. In another embodiment, the electric field uniformity may be improved by adjusting the distance between the substrate and the upper electrode.
Claims20
A plasma reactor, comprising:
- a first metal electrode comprising a concave portion that is covered by an insulating plate that is offset from the concave portion of the first metal electrode by an offset distance;
- a second metal electrode disposed across from the first metal electrode with the insulating plate facing the second metal electrode;
- and
- a Radio Frequency (RF) source configured to provide power to ionize molecules between the insulating plate and the second metal electrode.
1 more element
A device, comprising:
- a metal electrode comprising a concave portion that extends from a perimeter of the metal electrode to a high point near or along a center line of the metal electrode;
- and
- a non-conductive plate that is substantially planar and covers the concave portion, the non-conductive plate being offset from an outer perimeter of the concave portion by an offset distance.
A system, comprising:
- a first conductive electrode comprising:
- a concave portion with a concavity that defines the slope profile of the concave portion;
- and
- an insulating plate that covers the concave portion and is on the same plane as an open end of the concave portion;
- a second conductive electrode disposed across from the first conductive electrode;
- and
- a substrate spacer component protruding from the second conductive electrode to support a substrate at an offset distance from the second conductive electrode, the offset distance having magnitude that is based, at least in part, on the concavity of the concave portion.
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Dependencies are inferred from the claim text.