Method for ex-situ lift-out specimen preparation
AssigneeEXpressLO LLC
InventorLucille A. Giannuzzi
Life of this patent
Estimating the term…
Abstract
A method for mounting a specimen on a specimen carrier for milling in an ex-situ lift-out (EXLO) milling process is described where “cross-section” specimens, plan view specimens, or bulk specimens may be lifted-out for analysis. The method comprising positioning the specimen on a recessed surface within a specimen carrier top surface so that a region to be milled is centered about a carrier opening formed through the specimen carrier. Peripheral edges of the specimen are then wedged against inwardly sloping side walls framing the recessed surface. Finally, the specimen is mounted to the specimen carrier so that a path of a milling beam intersects the region to be milled and carrier opening.
Claims9
A method for mounting a specimen on a specimen carrier for milling in an ex-situ lift-out (EXLO) milling process where “cross-section” specimens, plan view specimens, bulk specimens may be lifted-out for analysis, the method comprising:
- positioning the specimen on a recessed surface within a specimen carrier top surface so that a region to be milled is centered about a carrier opening formed through the specimen carrier;
- wedging peripheral edges of the specimen against inwardly sloping side walls framing the recessed surface;
- and
- mounting the specimen on a carrier so that a path of a milling beam intersects the region to be milled and carrier opening.
The method of claim 10, wherein the specimen carrier is rotated to present a backside of the specimen positioned on the recessed surface to the milling beam.
The method of claim 10, wherein the specimen is rotated on the specimen carrier to present a backside of the specimen positioned on the recessed surface to the milling beam.
The method of claim 10, wherein the specimen is configured with an asymmetry cut so that an orientation of the specimen can be determined when the specimen is mounted in the specimen carrier.
The method of claim 13, wherein the asymmetry is defined by an asymmetric cut is formed on a single side of the specimen.
The method of claim 13, wherein the asymmetric cut results in the specimen having a wedge shape.
The method of claim 15, wherein the wedge shape has profile with a right angle.
The method of claim 10, wherein the step of mounting the specimen on the carrier includes interposing a glue, adhesive or epoxy between the specimen and the recessed surface on the carrier.
The method of claim 13 wherein the asymmetry of the specimen is defined by a protective deposition layer.
Dependencies are inferred from the claim text.