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US 2013/0340858 A1Published application
Gas Hood for Gas Regulator
AssigneeUnited Microelectronics Corp.
InventorShih-Hsun Chang
Life of this patent
Estimating the term…
Abstract
A gas hood for a gas regulator comprises a housing for covering a gas regulator, an opening for receiving the gas regulator and semi-sealing the space between the housing and the gas regulator, and a gas inlet for constantly introducing gas into the space, wherein parts of the gas escapes from the opening so that the space can maintain a micro-positive pressure.
Claims14
A gas hood for a gas regulator, comprising:
- a housing for covering a gas regulator;
- an opening for receiving said gas regulator and semi-sealing the space between said housing and said gas regulator;
- and
- a gas inlet for constantly introducing gas into said space so that parts of said gas escapes from said opening and said space can maintain a micro-positive pressure.
1 more element
Dependencies are inferred from the claim text.