Vapor deposition particle projection device and vapor deposition device
AssigneeSharp Kabushiki Kaisha
InventorsTohru Sonoda, Shinichi Kawato, Satoshi Inoue, Satoshi Hashimoto
Life of this patent
Estimating the term…
Abstract
The vapor deposition particle injecting device (20) includes a crucible (22), a holder (21) having at least one injection hole (21a), and plate members (23 through 25) provided in the holder (21). The plate members (23 through 25) have respective openings (23a through 25a) corresponding to the injection hole (21a), and the plate members (23 through 25) are arranged away from each other in a direction perpendicular to the opening planes of the openings. The injection hole (21a) and the openings (23a through 25a) overlap each other in the plan view.
Claims14
A vapor deposition particle injecting device comprising:
- a vapor deposition particle generating section for generating vapor deposition particles in a form of gas by heating up a vapor deposition material;
- a holder having an injection hole through which the vapor deposition particles are injected outside, the number of the injection hole being at least one;
- and
- a plurality of plate members provided so as to constitute respective of a plurality of stages in the holder,
- each of the plurality of plate members having a through hole whose number corresponds to the number of the injection hole, and the plurality of plate members being arranged between the vapor deposition particle generating section and the injection hole so as to be spaced from each other in a direction perpendicular to opening planes of the injection hole and of the through holes, and
- the injection hole and the through holes overlapping each other when viewed in the direction perpendicular to the opening planes of the injection hole and of the through holes.
Dependencies are inferred from the claim text.