Acceleration sensor
AssigneeMurata Manufacturing Co., Ltd.
InventorsTakahiro KONISHI, Kazuhiro YOSHIDA
Life of this patent
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Abstract
An acceleration sensor with improved impact resistance includes a beam portion connected to a supporting portion at a base side and connected to a weight portion at a top side. The beam portion has a T-shaped cross-section, and piezoresistors are located on an upper surface of the beam portion. The weight portion connects to a top of the beam portion and is arranged inside the supporting portion. A C-shaped slit is provided between the weight portion and the supporting portion so as to surround the weight portion. The weight portion includes an extended portion in which an end of a top surface layer on a side facing the beam portion extends out toward the beam portion beyond an end of the supporting substrate layer on a side facing the beam portion.
Claims20
An acceleration sensor comprising:
- a weight portion;
- a supporting portion;
- a beam portion that connects an end of the weight portion to the supporting portion and in which strain deformation occurs in response to external stress;
- and
- a piezoresistor located on the beam portion and arranged to detect the external stress;
- wherein
- the weight portion, the supporting portion, and the beam portion are defined by a plurality of layers;
- one of the plurality of layers of the beam portion is a piezo formation layer in which the piezoresistor is provided;
- and
- the weight portion includes an extended portion in which an end of a first one of the plurality of layers that is a same layer as the piezo formation layer extends out toward the beam portion beyond an end of a second one of the plurality of layers, the end of first layer and the end of the second layer being on sides facing the beam portion.
Dependencies are inferred from the claim text.