Inertial sensor
AssigneeHitachi Automotive Systems, Ltd.
InventorsDaisuke MAEDA, Heewon JEONG, Masahide HAYASHI
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AssigneeHitachi Automotive Systems, Ltd.
InventorsDaisuke MAEDA, Heewon JEONG, Masahide HAYASHI
Estimating the term…
In an inertial sensor, an acceleration sensor element section includes a first movable section configured to respond to acceleration applied thereto and a diagnosis electrode configured to displace the first movable section with an electrostatic force according to voltage application from a control circuit section. An angular velocity sensor element section includes a second movable section configured to respond to an angular velocity applied thereto and a driving electrode configured to displace the second movable section with an electrostatic force according to voltage application from the control circuit section. A voltage signal input to the driving electrode and a voltage signal input to the diagnosis electrode are the same voltage signal. The voltage signal input to the diagnosis electrode is a signal for detecting a mechanical failure. Carrier signal for detecting displacement of the first movable section has frequency higher than frequency of signal applied to the diagnosis electrode.
An inertial sensor comprising:
Dependencies are inferred from the claim text.