Process for producing liquid ejection head
AssigneeCanon Kabushiki Kaisha
InventorsShinan Wang, Toru Nakakubo, Hirotaka Sekiguchi
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AssigneeCanon Kabushiki Kaisha
InventorsShinan Wang, Toru Nakakubo, Hirotaka Sekiguchi
Estimating the term…
A process for producing a liquid ejection head having a piezoelectric body provided with an ejection orifice for ejecting liquid and a pressure chamber communicating therewith for retaining the liquid, wherein an electrode is formed on an inner wall surface of the pressure chamber to deform the pressure chamber by piezoelectric action caused by applying voltage to the electrode to eject the liquid, comprising providing the piezoelectric body in which a surface thereof having the ejection orifice has an arithmetic mean roughness of 0.1-1 μm, forming a dry film resist pattern on the surface of the piezoelectric body so as to expose the ejection orifice and a linear region connected thereto, and forming a metal thin film pattern being connected to the electrode on the inner wall surface and continuously extending from the inner wall surface to the linear region by using the dry film resist pattern as a mask.
A process for producing a liquid ejection head having a piezoelectric body provided with an ejection orifice for ejecting a liquid and a pressure chamber communicating with the ejection orifice for retaining the liquid to be ejected from the ejection orifice, wherein an electrode is formed on an inner wall surface of the pressure chamber so that the pressure chamber is deformed by a piezoelectric action caused by applying a voltage to the electrode, thereby ejecting the liquid, the process comprising the steps of:
Dependencies are inferred from the claim text.