Moisture barrier coatings
AssigneeApplied Microstructures, Inc.
InventorsBoris Kobrin, Nikunj Hirji Dangaria, Romuald Nowak, Michael T. Grimes
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Abstract
A moisture barrier coating for protecting a substrate from moisture, comprises an inorganic layer disposed over the substrate, the inorganic layer comprising an oxide or nitride of an element selected from the group consisting of silicon, aluminum, titanium, zirconium, hafnium and combinations thereof; and an organic silicon-containing layer disposed over the inorganic layer.
Claims19
A moisture barrier coating for protecting a substrate from moisture, comprising:
- an inorganic layer disposed over the substrate, the inorganic layer comprising an oxide or nitride of an element selected from the group consisting of silicon, aluminum, titanium, zirconium, hafnium and combinations thereof;
- and
- an organic silicon-containing layer disposed over the inorganic layer.
A moisture barrier coating for protecting a substrate, comprising:
- an aluminum oxide layer disposed over the substrate;
- and
- an organic silicon-containing layer disposed over the inorganic layer.
A method of protecting a substrate from moisture, comprising:
- depositing an inorganic layer on the substrate, the inorganic layer comprising an oxide or nitride of an element selected from the group consisting of silicon, aluminum, titanium, zirconium, hafnium, and combinations thereof;
- and
- depositing an organic silicon-containing layer over the inorganic layer.
Dependencies are inferred from the claim text.