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AssigneeFoundation for Advancement of International Science
InventorsTadahiro OHMI, Akihiro MORIMOTO
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With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.
A vacuum tube manufacturing apparatus comprising a reduced-pressure vessel connecting portion, a gas exhaust mechanism connected to said reduced-pressure vessel connecting portion, and a gas supply mechanism connected to said reduced-pressure vessel connecting portion, said vacuum tube manufacturing apparatus characterized in that an inert gas supply mechanism is disposed on a reduced-pressure vessel side of said gas exhaust mechanism.
A vacuum tube manufacturing method comprising a step of attaching a reduced-pressure vessel to a vacuum tube manufacturing apparatus, a step of exhausting a gas in said reduced-pressure vessel, a step of filling at least a discharge gas into said reduced-pressure vessel, and a step of separating said reduced-pressure vessel filled with the discharge gas from said vacuum tube manufacturing apparatus, said vacuum tube manufacturing method characterized in that a dry inert gas is caused to flow in a reduced-pressure vessel connecting portion of said vacuum tube manufacturing apparatus before said reduced-pressure vessel is attached thereto.
A vacuum tube manufacturing method comprising a step of attaching a reduced-pressure vessel to a vacuum tube manufacturing apparatus, a step of exhausting a gas in said reduced-pressure vessel, a step of filling at least a discharge gas into said reduced-pressure vessel, and a step of separating said reduced-pressure vessel filled with the discharge gas from said vacuum tube manufacturing apparatus, said vacuum tube manufacturing method characterized in that the step of exhausting the gas in said reduced-pressure vessel is specified by carrying out combination of filling and exhaust of a dry gas a plurality of times.
Dependencies are inferred from the claim text.