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US 2013/0302994 A1Published application
Substrate carrier having drip edge configurations
AssigneeDynamic Micro Systems
InventorLutz Rebstock
Life of this patent
Estimating the term…
Abstract
Substrate carrier can have drainage area leading the liquid away from the substrates, so that liquid droplet can be channeled away from the substrate area. The drainage area can include tilted lines and surfaces toward the ground away from the substrates. The carrier can further have drainage area leading the liquid to an end of the carrier, which then can be channeled to the ground without being free fall to the ground.
Claims20
A carrier for supporting one or more substrates, the carrier comprising:
- at least one first structure;
- at least one second structure,
- wherein the second structure is secured to the first structure,
- wherein the second structure is partially protruded to a space defined by two adjacent substrates for separating the two adjacent substrates;
- wherein the second structure is configured so that liquid droplets are drained by gravitation force away from the substrates.
2 more elements
A carrier for supporting one or more substrates, the carrier comprising:
- at least one first structure;
- at least one second structure,
- wherein the second structure is secured to the first structure,
- wherein the second structure is partially protruded to a space defined by two adjacent substrates for separating the two adjacent substrates;
- wherein the second structure comprises surfaces tilting away from the substrates so that liquid droplets are drained by gravitation force away from the space.
2 more elements
A method comprising:
- supplying one or more substrates to a carrier,
- wherein the carrier comprises a structure protruded to a space defined by two adjacent substrates for separating the two adjacent substrates,
- wherein the structure comprises surfaces tilting away from the substrates;
- wetting the carrier and the substrates with a liquid,
- wherein the liquid droplets are drained by gravitation force away from the substrates.
2 more elements
Dependencies are inferred from the claim text.