Thin film forming device for solar cell and thin film forming method
AssigneesTokyo Electron Limited, University of Yamanashi
InventorsTakamasa Kato, Masaki Narushima, Kenichi Hara
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Abstract
This thin film forming method for a solar cell forms a thin film that contains a plurality of elements on the surface of an object to be processed. A raw material solution that contains the elements is dispersed in a processing space and microparticles by an electric field, and the microparticles that are dispersed form a thin film that adheres to the surface of the object to be processed. Thus, a thin film for a solar cell element with preferable crystallinity can be formed even in an atmosphere at atmospheric pressure.
Claims25
A thin film forming method comprising:
- holding a processed object to be processed;
- heating the processed object;
- dispersing a raw material solution containing a plurality of elements by an electric field such that the raw material solution becomes microparticles in a processing space;
- and
- causing the microparticles to be adhered to a surface of the processed object to form a thin film containing the plurality of elements.
2-5. (canceled)
A thin film forming device comprising:
- a raw material solution supply unit configured to supply a raw material solution containing a plurality of elements to a processing space;
- a holding unit configured to hold a processed object to be processed;
- a heating unit configured to heat the processed object;
- and
- an electric field power supply unit configured to apply a voltage between the holding unit and the raw material solution supply unit to generate an electric field and to disperse the raw material solution such that the raw material solution becomes microparticles by the electric field, the microparticles being electrically charged by the electric field and adhered to a surface of the processed object to form the thin film containing the plurality of elements.
13-17. (canceled)
A thin film forming device comprising:
- a raw material solution supply unit configured to supply a raw material solution containing a plurality of elements to a processing space;
- a holding unit configured to hold a processed object to be processed;
- a heating unit configured to heat the processed object;
- a draw-out electrode installed in the vicinity of the raw material solution supply unit;
- and
- a draw-out power supply unit configured to apply a voltage between the holding unit and the raw material solution supply unit to generate an electric field and to disperse the raw material solution such that the raw material solution becomes microparticles by the electric field, the microparticles being electrically charged by the electric field and adhered to a surface of the processed object to form a thin film containing the plurality of elements.
Dependencies are inferred from the claim text.