Wavelength dispersive x-ray fluorescence spectrometer
AssigneeRigaku Corporation
InventorsYoshiyuki Kataoka, Hisashi Inoue, Kosuke Kawakyu
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Abstract
In the wavelength dispersive X-ray fluorescence spectrometer of the present invention, a counting loss correcting unit (11), when correcting a counting rate of pulses determined by a counting unit (10) on the basis of a dead time of a detector (7), stores beforehand a correlation between a predetermined pulse height range, within which pulses are selected by a pulse height analyzer (9), and the dead time and determines the dead time so as to correspond to the predetermined pulse height range during a measurement on the basis of the stored correlation.
Claims5
A wavelength dispersive X-ray fluorescence spectrometer which comprises:
- an X-ray source for irradiating a sample with primary X-rays;
- a spectroscopic device for monochromating fluorescent X-rays emitted from the sample;
- a detector for receiving the fluorescent X-rays, which have been monochromated by the spectroscopic device, and generating pulses of a pulse height proportional to the energy of the fluorescent X-rays in a number dependent on the intensity of the fluorescent X-rays;
- a pulse height analyzer for selecting pulses of a pulse height within a predetermined pulse height range from the pulses generated by the detector;
- a counting unit for determining a counting rate of the pulses selected by the pulse height analyzer;
- and
- a counting loss correcting unit for correcting the counting rate of the pulses, determined by the counting unit, on the basis of a dead time of the detector with respect to a counting loss of the pulses to be counted;
- the counting loss correcting unit stores beforehand a correlation between each of a plurality of representative predetermined pulse height ranges and the dead time and determines the dead time, which corresponds to the predetermined pulse height range during a measurement, on the basis of the correlation so stored.
A wavelength dispersive X-ray fluorescence spectrometer which comprises:
- an X-ray source for irradiating a sample with primary X-rays;
- a spectroscopic device for monochromating fluorescent X-rays emitted from the sample;
- a detector for receiving the fluorescent X-rays, which have been monochromated by the spectroscopic device, and generating pulses of a pulse height proportional to an energy of the fluorescent X-rays in a number dependent on an intensity of the fluorescent X-rays;
- a pulse height analyzer for selecting pulses of a pulse height within a predetermined pulse height range from the pulses generated by the detector;
- a counting unit for determining a counting rate of the pulses selected by the pulse height analyzer;
- and
- a counting loss correcting unit for correcting the counting rate of the pulses, determined by the counting unit, on the basis of a dead time of the detector with respect to a counting loss of the pulses to be counted;
- the counting loss correcting unit stores beforehand a plurality of pulse height distributions for their respective counting rates and determines the dead time, which corresponds to the predetermined pulse height range during a measurement, on the basis of the pulse height distributions and the counting rates so stored.
Dependencies are inferred from the claim text.