Temperature controller for gas laser

A temperature controller for a gas laser comprising:

• a laser apparatus having a discharge portion to be filled up with a gaseous amplifiable agent and a discharge electrode placed in the discharge portion;
• a power supply electrically connected to the discharge electrode;
• a heat exchanger configured for cooling or heating cooling water;
• a pipe plumbing through the discharge electrode, the power supply and the heat exchanger, the heat exchanger supplying the cooling water to the pipe so that the cooling water passes through the discharge electrode before passing through the power supply;
• an energy and/or power detector configured for detecting energy and/or power of a laser light amplified by passing through the discharge portion;
• and
• a temperature control portion configured for controlling the heat exchanger based on a detection result by the energy and/or power detector.

A temperature controller for a gas laser which controls temperatures of a plurality of temperature-controlled apparatuses including a first temperature-controlled portion requiring a high-precision temperature-control and a second temperature-controlled portion requiring a low-precision temperature-control as compared with the first temperature-controlled portion and allowing a temperature-control with a low or high temperature as compared with the first temperature-controlled portion, the temperature controller for a gas laser comprising:

• a plurality of first temperature control portions each of which is arranged as corresponding to each first temperature-controlled portion and generates a cooling agent or a heating agent for adjusting at least each first temperature-controlled portion;
• a plurality of delivery piping systems connecting each first temperature control portion and each first temperature-controlled portion and delivering the cooling agent or the heating agent from each first temperature control portion;
• a plurality of return piping systems connecting each first temperature control portion and each second temperature-controlled portion and returning the cooling agent or the heating agent from each second temperature-controlled portion;
• and
• a plurality of connecting piping systems connecting each first temperature-controlled portion and each second temperature-controlled portion and delivering the cooling agent and the heating agent from the each first temperature-controlled portion to each second temperature control portion.