Ultra wide bandwidth transducer with dual electrode
AssigneeFUJIFILM Dimatix, Inc.
InventorArman Hajati
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Abstract
Wide bandwidth piezoelectric micromachined ultrasonic transducers (pMUTs), pMUT arrays and systems having wide bandwidth pMUT arrays are described herein. For example, a piezoelectric micromachined ultrasonic transducer (pMUT) includes a piezoelectric membrane disposed on a substrate. A reference electrode is coupled to the membrane. First and second drive/sense electrodes are coupled to the membrane to drive or sense a first and second mode of vibration in the membrane.
Claims19
A piezoelectric micromachined ultrasonic transducer (pMUT), comprising:
- a piezoelectric membrane disposed on a substrate;
- a reference electrode coupled to the membrane;
- and
- a first and second drive/sense electrode coupled to the membrane to drive or sense a first and second mode of vibration in the membrane.
An apparatus for generating and sensing pressure waves in a medium, the apparatus comprising:
- a piezoelectric micromachined ultrasonic transducer (pMUT) further comprising:
- a piezoelectric membrane disposed on a substrate;
- a reference electrode coupled to the membrane;
- and
- a first and second drive/sense electrode coupled to the membrane to drive or sense a first and second mode of vibration in the membrane;
- a first signal generator coupled to the first drive/sense electrode and to drive a first electrical signal on the first drive/sense electrode relative to the reference electrode;
- and
- a second signal generator coupled to the second drive/sense electrode and to drive a second electrical signal on the second drive/sense electrode relative to the reference electrode.
A piezoelectric micromachined ultrasonic transducer (pMUT) array, comprising:
- a plurality of sets of electrode rails disposed over an area of a substrate, each set of electrode rails comprising a reference rail and a pair of independently electrically addressable drive/sense rails and;
- a plurality of piezoelectric transducer elements, the plurality comprising separate element populations, each element population including more than one transducer element coupled to one of the sets of electrode rails, wherein each of the piezoelectric transducer elements further comprises:
- a piezoelectric membrane;
- a reference electrode coupled to the membrane and the reference rail;
- and
- a first and second drive/sense electrode coupled to the membrane and to respective ones of the drive/sense rail pair.
Dependencies are inferred from the claim text.