Method for synthesizing a material, in particular diamonds, by chemical vapor deposition, as well as device for applying the method
AssigneeDiarotech S.A.
InventorHoracio Tellez Oliva
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AssigneeDiarotech S.A.
InventorHoracio Tellez Oliva
Estimating the term…
Method for synthesising a material by chemical vapour deposition (CVD), according to which a plasma is created in a vacuum chamber in the vicinity of a substrate, and according to which a carbon-carrying substance and H2 are introduced into the chamber in order to produce in the chamber a gas comprising substances carrying reactive-carbon atoms in the form of unsaturated molecules or radicals from which the synthesis of said material will be performed, and in that the electromagnetic absorption and inelastic diffusion spectra of the solid material to be synthesised are used to take from these spectra the absorption frequencies that contribute to the reactions that lead to the formation of the solid material to be synthesised, and in that energetic rays are produced in the form of a photon beam carrying quantities of energy determined by each of the frequencies corresponding to said absorption and inelastic diffusion frequencies, said photon beam being injected into the plasma where, for energy states of the solid material, an absorption of these photons having the energy corresponding to these energy states is effected by the substances carrying said reactive-carbon atoms.
Method for synthesising a material, in particular diamond, by chemical vapour deposition (CVD), according to which a plasma is created in a vacuum chamber in the vicinity of a substrate arranged to carry the material to be synthesised, and according to which a substance carrying carbon, in particular CH4 or C2H2, and H2, is introduced into the chamber in order to produce in the chamber a gas comprising substances carrying reactive carbon atoms in the form of unsaturated molecules or radicals from which the synthesis of said material will be performed, characterised in that the electromagnetic absorption and inelastic diffusion spectra of the material to be synthesised are used to take from the spectra the absorption frequencies that contribute to the reactions that lead to the formation of the material to be synthesised, and in that energetic rays are produced in the form of photon beams carrying quantities of energy determined by each of the frequencies corresponding to said absorption and inelastic diffusion frequencies, said photon beam being injected into the plasma where, for energy states of the solid material, an absorption of these photons having the energy corresponding to these energy states is effected by the substances carrying said reactive carbon atoms.
Method for forming a semiconductor of type Si—Ge by chemical vapour deposition, characterised in that the deposition is carried out in a chamber and in that it comprises:
Device synthesising a material, in particular diamond, by chemical vapour deposition (CVD), the material to be synthesised having a crystallography with a set of possible faces, represented by a set of directional vectors where each vector indicates a direction normal to a given face of said material, said device comprising a substrate arranged to carry the solid material to be synthesised and a vacuum chamber comprising a plasma generator arranged to produce a plasma in the chamber in the vicinity of the substrate, said chamber comprising an entry arranged to introduce into the chamber a substance carrying carbon, in particular a carbon-carrying gas, in particular CH4 or C2H2, and H2, said chamber being arranged to produce therein, from the carbon-carrying substance and H2, a gas comprising radicals or molecules in unsaturated form from which the synthesis of said material will be effected, characterised in that the device comprises a photon beam generator mounted on the chamber and arranged to produce energetic rays, in particular infrared rays and/or X, UV and visible rays in the form of a photon beam carrying quantities of energy determined by each of the frequencies corresponding to an absorption frequency taken from an electromagnetic absorption and inelastic diffusion spectrum of the solid material to be synthesised and which produces a reaction that leads to the formation of the solid material to be synthesised, said photon beam generator being mounted on the chamber so that said beam produced can be injected into the chamber at an angle that corresponds both to the given directional vectors of said solid material and to the wave vector of the Brillouin zone associated with the energy of the photon mode including the mode at the zone centre, determining the energy contained in the photon beam, said photon beam generator being mounted on the chamber in order to be able to inject the photon beam into the plasma and, for energetic states of the solid material, caused by said substance carrying reactive carbon atoms, an absorption of these photons having the energy corresponding to these phonic states.
Dependencies are inferred from the claim text.