Photosensitive, developer-soluble bottom anti-reflective coating material
AssigneeBrewer Science Inc.
InventorsJoyce Lowes, Jinhua Dai, Alice Guerrero
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Abstract
Photosensitive, developer-soluble bottom anti-reflective coatings are described. Compositions and methods of forming the same are also disclosed along with resulting microelectronic structures. The anti-reflective compositions comprise a multi-functional epoxy compound having multiple epoxy moieties pendant therefrom and one or more crosslinkable chromophores bonded thereto. The compounds are dispersed or dissolved in a solvent system with a vinyl ether crosslinker and can be used to create crosslinkable and de-crosslinkable coatings for microelectronics fabrication.
Claims32
A photosensitive, developer-soluble anti-reflective composition for microelectronics fabrication, said composition comprising a multi-functional epoxy compound and a vinyl ether crosslinker dispersed or dissolved in a solvent system, wherein said multi-functional epoxy compound comprises one or more crosslinkable chromophores bonded thereto.
A method of forming a microelectronic structure, said method comprising:
- (a) providing a substrate having a surface;
- (b) forming a photosensitive, developer-soluble anti-reflective layer on said surface, said anti-reflective layer being formed from an anti-reflective composition comprising a multi-functional epoxy compound and a vinyl ether crosslinker dispersed or dissolved in a solvent system, wherein said multi-functional epoxy compound comprises one or more crosslinkable chromophores bonded thereto;
- and
- (c) forming an imaging layer on said anti-reflective layer.
A microelectronic structure comprising:
- a substrate having a surface;
- a cured photosensitive, developer-soluble anti-reflective layer adjacent said substrate surface, said anti-reflective layer being formed from an anti-reflective composition comprising a multi-functional epoxy compound and a vinyl ether crosslinker dispersed or dissolved in a solvent system, wherein said multi-functional epoxy compound comprises one or more crosslinkable chromophores bonded thereto;
- and
- an imaging layer adjacent said anti-reflective layer.
Dependencies are inferred from the claim text.