Back to results
US 2013/0280441 A1Published application
Deposition source
AssigneeSamsung Display Co., Ltd.
InventorsHye-Yeon Shim, Chang-Soon Ji, Jong-Woo Lee, Do-Sung Kwon
Life of this patent
Estimating the term…
Abstract
A deposition source with uniform deposition characteristics includes a crucible in which a deposition material is disposed; a heat transfer member disposed on upper portions of the deposition material in the crucible; and an accommodation member for accommodating the heat transfer member and including a mesh plate.
Claims21
A deposition source comprising:
- a crucible in which a deposition material is disposed;
- an accommodation member comprising a mesh plate and which is disposed adjacent the deposition material;
- and
- a heat transfer member disposed within the accommodation member and separated from an upper portion of the deposition material by the mesh plate.
1 more element
A deposition material holder for use in a crucible holding a deposition material source, the holder comprising:
- a housing having openings which allow the deposition material when in a gaseous form to pass through the housing and which is shaped to be accommodated in the crucible;
- and
- a heat transfer member disposed within the housing and comprising particles having a diameter greater than a size of the openings, the particles being non-reactive with the deposition material and having a good heat transfer efficiency property and a high heat-resistance property.
A method of performing deposition comprising:
- placing a holder in a crucible having an opening, over a deposition material in the crucible to cover the deposition material, wherein the holder is positioned between the opening and all of the deposition material, the holder comprising:
- a housing having openings;
- and
- a heat transfer member in the housing and comprising particles having a diameter greater than a size of the openings, the particles being non-reactive with the deposition material and having a high heat-resistance property;
- and
- heating the crucible and the particles to transform the deposition material into a gas which passes through the particles and openings to a substrate.
3 more elements
Dependencies are inferred from the claim text.