Apparatus and method for treating perfluoro-compound

An apparatus for treating a perfluoro-compound, which apparatus is to purify an exhaust gas containing a perfluoro-compound, the apparatus comprising:

• a pre-cleaner for decomposing the perfluoro-compound and removing a first acid gas produced by the decomposition;
• a filter for filtering out dust particles contained in the exhaust gas;
• a dust-collector for electrifying the dust particles contained in the exhaust gas by electrical discharge and collecting dusts;
• a catalytic reactor for decomposing the perfluoro-compound through a regenerative/catalytic reaction;
• a post-cleaner for eliminating a second acid gas generated by the regenerative/catalytic reaction;
• and
• a fan for letting the exhaust gas out,
• wherein the pre-cleaner, the filter, the dust-collector, the catalytic reactor, the post-cleaner, and the fan are arranged in series and sequentially put into operation.