Optical scanning device

Abstract

Optical scanning device 10 according to the present invention includes: plate-like movable mirror 11 having reflection surface 12 for reflecting light on one surface, and piezoelectric unit 13 including a plurality of piezoelectric elements on the other surface; a pair of torsionally deformable torsion beams 2 and 3 arranged opposite to each other at both ends of movable mirror 11 and swingably supporting movable mirror 11; driving units 4 and 5 for driving movable mirror 11 to oscillate; and compensating voltage application means 8 for applying a compensating voltage that is an alternating-current voltage to piezoelectric unit 13 when movable mirror 11 oscillates, thereby causing compensatory deformation in movable mirror 11 to compensate for deformation that occurs in movable mirror 11 due to the oscillation of movable mirror 11.

Dependencies are inferred from the claim text.