# US 2013/0278681 A1 · Piezoelectric ceramic, piezoelectric element, ultrasonic motor, and dust removing device

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- Number: US 2013/0278681 A1
- Document ID: US20130278681A1
- Status: Published application
- Kind: A1
- Application number: 13/868,428
- Filed: 2013-04-23
- Published: 2013-10-24
- Earliest claimed: 2012-04-24
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Hiroshi Saito; Kanako Oshima; Kaoru Miura; Hisato Yabuta; Jumpei Hayashi
- Web page: https://patentgrep.com/patent/US20130278681A1

## CPC

- G02B 27/0006: {with means to keep optical surfaces clean, e.g. by preventing or removing dirt, stains, contamination, condensation (G02B1/18 takes precedence; cleaning in general B08B)}
- B41J 2/045: by pressure, e.g. electromechanical transducers
- H02N 2/001: {Driving devices, e.g. vibrators}
- H02N 2/106: {Langevin motors}
- H02N 2/163: {Motors with ring stator}
- H04R 17/00: Piezoelectric transducers; Electrostrictive transducers (piezoelectric or electrostrictive elements in general H10N30/00; details of piezoelectric or electrostrictive motors, generators or positioners {H10N30/00})
- H10N 30/053: by integrally sintering piezoelectric or electrostrictive bodies and electrodes
- H10N 30/097: by sintering
- H10N 30/2047: {Membrane type}
- H10N 30/50: having a stacked or multilayer structure
- H10N 30/8536: {Alkaline earth metal based oxides, e.g. barium titanates}
- H10N 30/877: {Conductive materials}
- Y10T 29/42: Piezoelectric device making
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K)
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

There is provided a lead-free piezoelectric ceramic having a high and stable piezoelectric constant and a high and stable mechanical quality factor in a wide operating temperature range. A method for manufacturing the lead-free piezoelectric ceramic is also provided. the general formula (1) (Ba1-xCax)a(Ti1-y-zSnyZrz)O3 (0.08≦x≦0.20, 0.01≦y≦0.04, 0≦z≦0.04) (1) A piezoelectric ceramic includes a main component containing a perovskite type metal oxide having the following general formula (1); and Mn as a first auxiliary component. The amount b (mol) of Mn per mole of the metal oxide is in the range of 0.0048≦b≦0.0400, and the value a of the general formula (1) or (2) is in the range of 0.9925+b≦a≦1.0025+b.

## Claims

### Claim 1

A piezoelectric ceramic, comprising: a main component containing a perovskite type metal oxide having the following general formula (1) or (2); and Mn as a first auxiliary component,
(Ba1-xCax)a(Ti1-y-zSnyZrz)O3
(0.08≦x≦0.20, 0.01≦y≦0.04, 0≦z≦0.04) (1)
(Ba1-xCax)a(Ti1-ySny)O3
(0.08≦x≦0.20, 0.01≦y≦0.04) (2)
wherein the amount b (mol) of Mn per mole of the metal oxide is in the range of 0.0048≦b≦0.0400, and the value a of the general formula (1) or (2) is in the range of 0.9925+b≦a≦1.0025+b.

### Claim 2 (depends on 1)

The piezoelectric ceramic according to claim 1, wherein the value z of the general formula (1) is zero.

### Claim 3 (depends on 1)

The piezoelectric ceramic according to claim 1, further comprising a second auxiliary component containing at least one selected from the group consisting of Cu, B, and Si, wherein the second auxiliary component content on a metal basis is 0.001 parts by weight or more and 4.000 parts by weight or less per 100 parts by weight of the metal oxide.

### Claim 4 (depends on 1)

The piezoelectric ceramic according to claim 1, wherein the average equivalent circular diameter of a plurality of crystal grains of the piezoelectric ceramic is 1 μm or more and 10 μm or less, and crystal grains having an equivalent circular diameter of 25 μm or less constitute 99 percent by number or more of the total crystal grains.

### Claim 5 (depends on 1)

The piezoelectric ceramic according to claim 1, wherein the piezoelectric ceramic has a relative density of 90% or more and 100% or less.

### Claim 6 (depends on 1)

A method for manufacturing the piezoelectric ceramic according to claim 1, comprising: sintering a compact containing at least Ba, Ca, Ti, Sn, and Mn at a temperature of 1200° C. or less.

### Claim 7 (depends on 1)

A piezoelectric element, comprising: a first electrode; a piezoelectric ceramic; and a second electrode, wherein the piezoelectric ceramic is the piezoelectric ceramic according to claim 1.

### Claim 8 (depends on 1)

A multilayered piezoelectric element, comprising: piezoelectric ceramic layers and electrode layers alternately stacked on top of one another, the electrode layers including an internal electrode, wherein the piezoelectric ceramic layers are formed of the piezoelectric ceramic according to claim 1.

### Claim 9 (depends on 8)

The multilayered piezoelectric element according to claim 8, wherein the internal electrode contains Ag and Pd, and the weight ratio M1/M2 of the weight M1 of Ag to the weight M2 of Pd is in the range of 0.25≦M1/M2≦4.0.

### Claim 10 (depends on 8)

The multilayered piezoelectric element according to claim 8, wherein the internal electrode contains at least one of Ni and Cu.

### Claim 11 (depends on 8)

A method for manufacturing the multilayered piezoelectric element according to claim 8, comprising: (A) dispersing a metallic compound containing at least Ba, Ca, Ti, Sn, and Mn to produce a slurry; (B) forming a compact from the slurry; (C) forming an electrode on the compact; and (D) sintering a plurality of the compacts at a temperature of 1200° C. or less to manufacture the multilayered piezoelectric element.

### Claim 12 (depends on 11)

The method for manufacturing the multilayered piezoelectric element according to claim 11, wherein the slurry contains a perovskite type metal oxide containing at least one of Ba and Ca and at least one of Ti and Sn.

### Claim 13 (depends on 7)

A liquid discharge head, comprising: a liquid chamber; and a discharge port in communication with the liquid chamber, wherein the liquid chamber has a vibrating unit that includes the piezoelectric element according to claim 7.

### Claim 14 (depends on 13)

A liquid discharge apparatus, comprising: a recording medium conveying unit; and the liquid discharge head according to claim 13.

### Claim 15 (depends on 7)

An ultrasonic motor, comprising: a vibrating member that includes the piezoelectric element according to claim 7; and a moving body in contact with the vibrating member.

### Claim 16 (depends on 7)

A vibratory apparatus, comprising a vibrating member that includes the piezoelectric element according to claim 7.

### Claim 17 (depends on 16)

A dust removing device, comprising the vibratory apparatus according to claim 16 in a vibrating unit.

### Claim 18 (depends on 17)

An image pickup apparatus, comprising: the dust removing device according to claim 17 and an image pickup element unit, wherein the dust removing device includes a vibrating member on the light-receiving surface of the image pickup element unit.

### Claim 19 (depends on 7)

Electronic equipment, comprising a piezoelectric acoustic component that includes the piezoelectric element according to claim 7.