# US 2013/0278136 A1 · Antenna structure and plasma generating device > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 2013/0278136 A1 - Document ID: US20130278136A1 - Status: Published application - Kind: A1 - Application number: 13/990,840 - Filed: 2011-09-16 - Published: 2013-10-24 - Earliest claimed: 2011-09-16 - Assignees: Semes Co., Ltd. - Inventors: Yong Kwan Lee - Web page: https://patentgrep.com/patent/US20130278136A1 ## CPC - H05H 1/46: using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence) - H01J 37/3211: {Antennas, e.g. particular shapes of coils} - H01J 2237/327: Arrangements for generating the plasma - H05H 1/4652: {using inductive coupling means, e.g. coils} - H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) ## Abstract An antenna structure includes four induction antennas which have the same structure, are connected in parallel and are disposed to be overlapped. The induction antennas include an external upper section arranged on a first quadrant of a first layer, an internal upper section connected to the external upper section and arranged on a second quadrant of the first layer, an internal lower section connected to the internal upper section and arranged on a third quadrant of a second layer arranged on a lower part of the first layer, and an external lower section connected to the internal lower section and arranged on a fourth quadrant of the second layer. An RF power is supplied to one end of the external upper section, and the other end of the external lower section is grounded. ## Claims ### Claim 1 An antenna structure for plasma generation, comprising: four induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped, wherein the induction antennas comprises: an external upper section disposed on a first quadrant of a first layer; an internal upper section connected to the external upper section and disposed on a second quadrant of the first layer; an internal lower section connected to the internal upper section and disposed on a third quadrant of a second layer disposed at a lower part of the first layer; and an external lower section connected to the internal lower section and disposed on a fourth quadrant of the second layer, wherein one ends of the external upper sections are supplied with an RF power and the other ends of the external lower sections are grounded. ### Claim 2 (depends on 1) The antenna structure of claim 1, further comprising: an upper branch connecting the other end of the external upper section and one end of the internal upper section; a vertical branch connecting the other end of the internal upper section and one end of the internal lower section; and a lower branch connecting the other end of the internal lower section and one end of the external lower section. ### Claim 3 (depends on 1) The antenna structure of claim 1, wherein each of the external upper section and the external lower section has a first curvature and each of the internal upper section and the internal lower section has a second curvature, a radius of the first curvature being larger than a radius of the second curvature. ### Claim 4 (depends on 1) The antenna structure of claim 1, wherein each of the external upper section and the external lower section is bent at a right angle and each of the internal upper section and the internal lower section is bent at a right angle. ### Claim 5 (depends on 1) The antenna structure of claim 1, wherein an insulation layer is disposed between the first layer and the second layer. ### Claim 6 (depends on 1) The antenna structure of claim 1, wherein widths of the external upper section and the external lower section are narrower than widths of the internal upper section and the internal lower section ### Claim 7 An antenna structure for plasma generation, comprising: four induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped, wherein the induction antennas comprises: An antenna structure for plasma generation, comprising: two induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped, wherein the induction antennas 101a comprises: an external upper section 110a disposed on a first quadrant of a first layer 141; an internal upper section 112a connected to the external upper section 110a and disposed on a second quadrant of a second layer 142 disposed at an upper part of the first layer; an internal lower section 122a connected to the internal upper section 112a and disposed on a third quadrant of a third layer 143 disposed at a lower part of the second layer; and an external lower section 120a connected to the internal lower section 112a and disposed on a fourth quadrant of a fourth layer 144 disposed at a lower part of the first layer 141, wherein one end of the external upper section 110a is supplied with an RF power, and the other end of the external lower section 120a is grounded. ### Claim 8 (depends on 7) The antenna structure of claim 7, further comprising: an upper branch connecting the other end of the external upper section and one end of the internal upper section; a vertical branch connecting the other end of the internal upper section and one end of the internal lower section; and a lower branch connecting the other end of the internal lower section and one end of the external lower section. ### Claim 9 An antenna structure for plasma generation, comprising: two induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped, wherein the induction antennas comprises: an external upper section disposed over a first quadrant and a second quadrant of a first layer; an internal upper section connected to the external upper section and disposed over a third quadrant and a fourth quadrant of the first layer; an internal lower section connected to the internal upper section and disposed over a first quadrant and a second quadrant of a second layer disposed at a lower part of the first layer; and an external lower section connected to the internal lower section and disposed over a third quadrant and a fourth quadrant of the second layer, wherein one end of the external upper section is supplied with an RF power, and the other end of the external lower section is grounded. ### Claim 10 (depends on 9) The antenna structure of claim 9, further comprising: an upper branch connecting the other end of the external upper section and one end of the internal upper section; a vertical branch connecting the other end of the internal upper section and one end of the internal lower section; and a lower branch connecting the other end of the internal lower section and one end of the external lower section. ### Claim 11 A plasma generating device comprising: The plasma generating device is a vacuum container; a dielectric unit disposed at a part of the vacuum container; and an antenna structure for plasma generation disposed on the dielectric unit comprises, wherein the antenna structure includes four induction antennas which have the same structure, are connected in parallel with one another, and are disposed to be overlapped, wherein the induction antennas comprises: an external upper section disposed on a first quadrant of a first layer; an internal upper section connected to the external upper section and disposed on a second quadrant of the first layer; an internal lower section connected to the internal upper section and disposed on a third quadrant of a second layer disposed at a lower part of the first layer; and an external lower section connected to the internal lower section and disposed on a fourth quadrant of the second layer, and wherein one ends of the external upper sections are supplied with an RF power and the other ends of the external lower sections are grounded. ### Claim 12 (depends on 11) The plasma generating device of claim 11, wherein the antenna structure comprises a first antenna structure and a second antenna structure, the second antenna structure being disposed in the first antenna structure. ### Claim 13 (depends on 11) The plasma generating device of claim 11, wherein the dielectric unit comprises a plurality of dielectric portions spaced apart from one other and the antenna structure comprises a plurality of antenna structures spaced apart from one other, the antenna structures being disposed on the dielectric portions each corresponding to the antenna structures.