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US 2013/0278135 A1Published application
Multi discharging tube plasma reactor
OwnerDai-Kyu CHOIinventor
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Abstract
A plasma reactor having multi discharging tubes is disclosed, through which activated gas containing ion, free radical, atom and molecule is generated through plasma discharging, and different process gases are injected into multi discharging tubes in which solid, power and gas, etc., are plasma-treated with the activated gas to perform processes including cleaning process for semiconductor, and a plasma state can be maintained even at low power.
Claims17
A plasma reactor having multi discharging tubes, comprising:
- an upper hollow discharging tube having a gas inlet;
- a lower hollow discharging tube having a gas exit;
- a plurality of discharging tube bridges wherein an upper part and a lower part of each discharging tube bridge are coupled between the upper discharging tube and the lower discharging tube respectively;
- a transformer coupled plasma source that is equipped on the discharging tube bridge and has a magnetic core on which a first winding coil is wound;
- and
- a AC switching power supply for supplying plasma generation power to the first winding coil.
3 more elements
Dependencies are inferred from the claim text.