Deposition apparatus

Abstract

A deposition apparatus includes a crucible having an inlet, a first heater heating the crucible, a tank supplying an object to be deposited to the crucible and having an outlet, a second heater heating the tank, and a transfer pipe connecting the outlet of the tank and the inlet of the crucible. The first heater has a first temperature range, and the second heater has a second temperature range lower than the first temperature range. The object to be deposited may be liquefied within the tank and transferred in the liquid state to the crucible via the transfer pipe. The amount of the object to be deposited within the crucible may be continuously maintained at an approximately constant value by regulation of the flow of the liquefied object to be deposited from the tank to the crucible based upon the weight of the object to be deposited within the crucible.

Dependencies are inferred from the claim text.